Improved state estimation for high-mix semiconductor manufacturing.
Jin WangQ. Peter HeThomas F. EdgarPublished in: ACC (2013)
Keyphrases
- state estimation
- semiconductor manufacturing
- state space model
- kalman filter
- dynamic systems
- process control
- discrete event simulation
- particle filter
- kalman filtering
- visual tracking
- particle filtering
- extended kalman filter
- machine learning
- infrared
- data fusion
- control system
- real time
- spatio temporal
- estimation problems
- multi agent