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Symbiotic Simulation Control in Semiconductor Manufacturing.
Heiko Aydt
Stephen John Turner
Wentong Cai
Malcolm Yoke Hean Low
Peter Lendermann
Boon-Ping Gan
Published in:
ICCS (3) (2008)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
discrete event
control system
simulation model
feedback control
data acquisition
control strategies
neural network
matlab simulink
mathematical model
simulation study
real time
supply chain
control problems
artificial intelligence
data sets