Compact High-Performance Vibration Sensor Based on Single-Backplate MEMS Technology.
Somu GoswamiChristian BretthauerAndreas BognerAbhiraj BasavannaSebastian AnzingerMarco HauboldGunar LorenzJohann StrasserDaniel WeberLorenzo ServadeiRobert WillePublished in: IEEE SENSORS (2022)