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Implementation of response surface methodology using variance reduction techniques in semiconductor manufacturing.
Charles D. McAllister
Bertan Altuntas
Matthew Frank
Juergen Potoradi
Published in:
WSC (2001)
Keyphrases
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semiconductor manufacturing
variance reduction
response surface methodology
sample size
monte carlo
gradient estimation
process control
artificial intelligence
machine learning
search algorithm
expert systems
production system
support vector regression
naive bayes classifier
particle swarm optimisation