Login / Signup

A reliable course of Scanning Capacitance Microscopy analysis applied for 2D-Dopant Profilings of Power MOSFET Devices.

Markus LeichtG. FritzerB. BasnarS. GolkaJürgen Smoliner
Published in: Microelectron. Reliab. (2001)
Keyphrases
  • data analysis
  • image analysis
  • statistical analysis
  • high frequency
  • neural network
  • search algorithm
  • pattern recognition
  • low cost
  • low power