All-Si Metasurface Polarizing Bandpass Filter Mass Produced on 12 Inch Wafer.

Zhengji Xu Yuan Dong Chi Kuo Tseng Ting Hu Jinchao Tong Qize Zhong Larry Sim Keng Heng Lai Ying Lin Dongdong Li Yu Li Vladimir Bliznetsov Yuan Hsing Fu Shiyang Zhu Qunying Lin Dao Hua Zhang Dim Lee Kwong Yuandong Gu

Published in: OFC (2019)

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