Simulation-Based Advanced WIP Management and Control in Semiconductor Manufacturing.

Kazuo Miyashita Tsukasa Okazaki Hirofumi Matsuo

Published in: WSC (2004)

Keyphrases

semiconductor manufacturing
process control
discrete event simulation
information systems
control system
data management
knowledge management
management system
data processing
control problems
information retrieval
complex systems
data acquisition
control strategy
database
digital libraries
social networks