Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs.

Qiao Chen Hao Zhang Xiaoyang Zhang Dacheng Xu Huikai Xie

Published in: NEMS (2013)

Keyphrases

real time
three dimensional
genetic algorithm
artificial intelligence
information systems
feature selection
image processing
image sequences
bayesian networks
expert systems
viewpoint
evolutionary algorithm
low cost
statistical analysis
simulation study