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Dynamic Scheduling Rule Selection for Semiconductor Wafer Fabrication.
Bo-Wei Hsieh
Shi-Chung Chang
Chun-Hung Chen
Published in:
ICRA (2001)
Keyphrases
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wafer fabrication
dynamic scheduling
rule selection
rule base
flexible manufacturing systems
fuzzy rules
process planning
fuzzy logic controller
forward chaining
image processing
neural network
grid services