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Dynamic Scheduling Rule Selection for Semiconductor Wafer Fabrication.

Bo-Wei HsiehShi-Chung ChangChun-Hung Chen
Published in: ICRA (2001)
Keyphrases
  • wafer fabrication
  • dynamic scheduling
  • rule selection
  • rule base
  • flexible manufacturing systems
  • fuzzy rules
  • process planning
  • fuzzy logic controller
  • forward chaining
  • image processing
  • neural network
  • grid services