Detection of dislocation-free state in Dash-necking process of Si crystal growth furnace using the Czochralski Method.
Shiori UetaToru KuriharaYuta SaibaraHideyuki SatoPao-Hua ChuPublished in: SICE (2020)
Keyphrases
- detection method
- experimental evaluation
- preprocessing
- false positive rate
- high accuracy
- similarity measure
- diffusion process
- detection algorithm
- support vector machine
- cost function
- data sets
- feature set
- computational cost
- hidden markov models
- synthetic data
- segmentation method
- automatic detection
- optimization process
- power plant
- recognition process