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Investigation of the influence of thermal treatment on interconnect-barrier interfaces in copper metallization systems.

Oliver AubelEberhard BugielDietmar KrügerWolfgang HasseMartina Hommel
Published in: Microelectron. Reliab. (2006)
Keyphrases
  • building blocks
  • infrared
  • databases
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  • high speed
  • complex systems
  • database
  • case study
  • user interface
  • management system
  • computer systems
  • steady state