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Periodic Workload Control: A Viable Alternative for Semiconductor Manufacturing.
Philipp Neuner
Stefan Haeussler
Quirin Ilmer
Published in:
WSC (2020)
Keyphrases
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viable alternative
semiconductor manufacturing
process control
fine tuning
discrete event simulation
control system
response time
production system
control strategy
robot control
evolutionary algorithm
control method
control strategies
database
reinforcement learning
web services
website
machine learning