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Semiconductor FAB layout design analysis with 300-mm FAB data: "Is minimum distance-based layout design best for semiconductor FAB design?".

Junghoon KimGwangjae YuYoung Jae Jang
Published in: Comput. Ind. Eng. (2016)
Keyphrases
  • layout design
  • data analysis
  • data sets
  • statistical analysis
  • integer programming
  • database
  • data sources
  • data collection
  • data acquisition
  • data mining
  • expert systems
  • spatial data
  • computer aided
  • information services