Characterizing and Reducing the Layout Dependent Effect and Gate Resistance to Enable Multiple-Vt Scaling for a 3nm CMOS Technology.
C. A. LuH. P. LeeH. C. ChenY. C. LinY. H. ChungS. H. WangJ. Y. YehV. S. ChangM. C. ChiangW. ChangH. C. ChungC. F. ChengH. H. HsuH. H. LiuWilliam P. N. ChenC. Y. LinPublished in: VLSI Technology and Circuits (2023)