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Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison Among Numerical Techniques for Recovering the Membrane Profile.
Mario Versaci
Alessandra Jannelli
Giovanni Angiulli
Published in:
IEEE Access (2020)
Keyphrases
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electro mechanical systems
wireless sensor networks
sensitivity analysis
data sets
case study
mobile devices
statistical analysis
qualitative and quantitative
embedded devices
neural network
user profiles
numerical analysis
processing capabilities