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Cycle time analysis for cluster tools with parallel process chambers, processing time variation, and chamber cleaning operations.

Chunrong PanYiming LaiYan QiaoNaiqi WuXin Luo
Published in: Expert Syst. Appl. (2024)
Keyphrases
  • process model
  • parallel processing
  • analysis tool
  • web services
  • data analysis
  • expert systems
  • image analysis
  • object oriented
  • statistical analysis
  • hierarchical clustering
  • software tools
  • interaction analysis