Monte Carlo Calculation of One- and Two-Dimensional Particle and Damage Distributions for Ion-Implanted Dopants in Silicon.
J. AlbersPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1985)
Keyphrases
- monte carlo
- monte carlo method
- matrix inversion
- markov chain
- importance sampling
- three dimensional
- monte carlo simulation
- confidence intervals
- probability distribution
- markovian decision
- random variables
- simulation study
- monte carlo tree search
- stochastic approximation
- monte carlo methods
- adaptive sampling
- temporal difference
- particle filter
- variance reduction
- point processes
- search algorithm