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Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment.

Riccardo Emanuele SarpietroCarmelo PinoSalvatore CoffaAngelo Alberto MessinaSimone PalazzoSebastiano BattiatoConcetto SpampinatoFrancesco Rundo
Published in: IEEE Access (2022)
Keyphrases
  • deep learning
  • unsupervised learning
  • unsupervised feature learning
  • data sets
  • training data
  • information extraction
  • integrated circuit
  • restricted boltzmann machine