Machine Learning Techniques for Identifying the Defective Patterns in Semiconductor Wafer Maps: A Survey, Empirical, and Experimental Evaluations.
Kamal TahaPublished in: CoRR (2023)
Keyphrases
- semiconductor manufacturing
- experimental evaluation
- machine learning
- pattern discovery
- data mining techniques
- wafer fabrication
- information systems
- database
- theoretical analysis
- machine learning methods
- pattern analysis
- neural network
- face recognition
- expert systems
- frequent patterns
- production system
- data mining
- discovering interesting
- databases