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Low-Drift MEMS Thermal Wind Sensor With Symmetric Packaging Using Plastic Injection Molding Process.
Zhenjun Wang
Zhenxiang Yi
Ming Qin
Qing-An Huang
Published in:
IEEE Trans. Instrum. Meas. (2021)
Keyphrases
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real time
data mining
design process
process model
sensor data
diffusion process
flow analysis