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An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks.

Giorgio MussiMarco BestettiValentina ZegaAttilio FrangiGabriele GattereGiacomo Langfelder
Published in: IEEE Trans. Ind. Electron. (2020)
Keyphrases
  • real time
  • random access memory
  • thin film
  • low cost
  • high volume