An approach to regulating machine sharing in reconfigurable back-end semiconductor manufacturing.
Robin G. QiuSanjay JoshiPatrick McDonnellPublished in: J. Intell. Manuf. (2004)
Keyphrases
- back end
- semiconductor manufacturing
- user friendly
- discrete event simulation
- process control
- data types
- data management
- low cost
- building blocks
- version control
- production system
- data sharing
- database
- detailed design
- hardware implementation
- batch processing
- knowledge sharing
- information sharing
- real world
- real time
- general purpose
- dynamic programming
- fine grain
- control system
- machine learning