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A Fast Lithography Verification Framework for Litho-Friendly Layout Design.

Yong-Chan BanSoo-Han ChoiKi-Hung LeeDong-Hyun KimJisuk HongYoo-Hyon KimMoon-Hyun YooJeong-Taek Kong
Published in: ISQED (2005)
Keyphrases
  • layout design
  • main contribution
  • linear programming