Simplified Subspaced Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps.
Fatima AdlyOmar AlhusseinPaul D. YooYousof Al-HammadiKamal TahaSami MuhaidatYoung-Seon JeongUihyoung LeeMohammed IsmailPublished in: IEEE Trans. Ind. Informatics (2015)
Keyphrases
- semiconductor manufacturing
- network structure
- network model
- peer to peer
- regression model
- computer networks
- network architecture
- wafer fabrication
- network traffic
- communication patterns
- support vector regression
- linear regression
- input patterns
- regression analysis
- integrated circuit
- data sets
- communication networks
- least squares
- support vector machine