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A Methodology for Efficient Dynamic Spatial Sampling and Reconstruction of Wafer Profiles.

Seán F. McLooneAdrian B. JohnstonGian Antonio Susto
Published in: IEEE Trans Autom. Sci. Eng. (2018)
Keyphrases
  • lightweight
  • sample size
  • spatial data
  • design methodology
  • information systems
  • computationally efficient
  • cost effective
  • spatial distribution
  • spatial objects
  • reconstruction process