Sign in

Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting.

Jipeng WangHesuan HuChunrong PanLiang Li
Published in: IEEE Access (2021)
Keyphrases
  • optimization process
  • neural network
  • optimization problems
  • global optimization
  • real time
  • decision making
  • case study
  • optimization algorithm
  • steady state
  • software engineering
  • decision support
  • design process