Learning-based release control of semiconductor wafer fabrication facilities.

Li Li Zhongbo Chen Qingyun Yu Nan Xiang

Published in: WSC (2015)

Keyphrases

learning algorithm
control system
learning problems
inductive inference
learning systems
wafer fabrication
reinforcement learning
lower bound
learning process
unsupervised learning
learning tasks
incremental learning
learning analytics
robot control
motor control