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Optimization of preventive maintenance strategies in a multipurpose batch plant: application to semiconductor manufacturing.

Anne-Sylvie CharlesIoana-Ruxandra FloruCatherine Azzaro-PantelLuc PibouleauSerge Domenech
Published in: Comput. Chem. Eng. (2003)
Keyphrases
  • semiconductor manufacturing
  • preventive maintenance
  • optimization strategies
  • control system
  • optimization problems
  • process control
  • data mining
  • expert systems
  • multi dimensional