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A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks.
Sinyoung Kim
Jaeyeon Jang
Chang Ouk Kim
Published in:
J. Intell. Manuf. (2021)
Keyphrases
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least squares
real time
social networks
case study
genetic algorithm
computer vision
video sequences
fuzzy logic
image registration
process model
closed loop