Sign in
A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks.
Sinyoung Kim
Jaeyeon Jang
Chang Ouk Kim
Published in:
J. Intell. Manuf. (2021)
Keyphrases
</>
least squares
real time
social networks
case study
genetic algorithm
computer vision
video sequences
fuzzy logic
image registration
process model
closed loop