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A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation.
Zai-Fa Zhou
Qing-An Huang
Wei-Hua Li
Wei Lu
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2007)
Keyphrases
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cellular automata model
thin film
real time
information retrieval
face recognition
multi layer
neural network
decision making
relational databases
dynamic environments
mathematical model
integrated circuit
simulation environment