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An effective system for parameter optimization in photolithography process of a LGP stamper.

Wen-Chin ChenXiao-Yun JiangHui-Pin ChangHisa-Ping Chen
Published in: Neural Comput. Appl. (2014)
Keyphrases
  • parameter optimization
  • genetic algorithm ga
  • machine learning
  • differential evolution
  • real time
  • neural network
  • manufacturing systems
  • training set
  • particle swarm optimization