A Hierarchical Approach to Qualification Management in wafer fabs.
Denny KoppLars MönchPublished in: WSC (2018)
Keyphrases
- management system
- information management
- decision support
- data sets
- hierarchical structure
- decision making
- data management
- data processing
- artificial neural networks
- search algorithm
- real time
- bayesian networks
- case study
- artificial intelligence
- machine learning
- coarse to fine
- massively parallel
- hierarchical model
- configuration management
- management policies