Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor.
Braiden TongHong-Quan NguyenTuan-Hung NguyenTuan-Khoa NguyenViet Thanh NguyenToan DinhTrung-Hieu VuVan Thanh DauDzung Viet DaoPublished in: IEEE SENSORS (2022)
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