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Invention principles and contradiction matrix for semiconductor manufacturing industry: chemical mechanical polishing.
D. Daniel Sheu
Chia-Hung Chen
Pang-Yen Yu
Published in:
J. Intell. Manuf. (2012)
Keyphrases
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manufacturing industry
supply chain management
manufacturing companies
information technology
low rank
chemical compounds
semiconductor manufacturing
logistics industry
information systems
supply chain
linear algebra
singular values
mechanical design