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Calibration of Scanning Electron Microscope with Improved Model of the Silicon Relief Measure.

Anton ShantyrEugenij VolodarskiZygmunt L. Warsza
Published in: AUTOMATION (2017)
Keyphrases
  • statistical model
  • theoretical framework
  • image segmentation
  • probabilistic model
  • computational model
  • objective function
  • mathematical model
  • real time