Dynamic Support Vector Regression Control System for Overlay Error Compensation With Stochastic Metrology Delay.
Marzieh KhakifiroozChen Fu ChienYing-Jen ChenPublished in: IEEE Trans Autom. Sci. Eng. (2020)
Keyphrases
- support vector regression
- control system
- error compensation
- hybrid model
- support vector
- response surface methodology
- fuzzy logic
- regression model
- support vector classification
- support vector machine
- extreme learning machine
- wavelet frame
- support vector machine svm
- kernel function
- spatio temporal
- pattern recognition
- motion estimation
- multiresolution
- hybrid genetic
- neural network