High-fidelity rapid prototyping of 300 mm fabs through discrete event system modeling.
Jonghun ParkSpyros A. ReveliotisDouglas A. BodnerChen ZhouJennfong WuLeon F. McGinnisPublished in: Comput. Ind. (2001)
Keyphrases
- high fidelity
- discrete event
- rapid prototyping
- discrete event simulation
- dynamic systems
- mathematical modeling
- simulation model
- high quality
- real time
- agent oriented programming
- development environment
- supervisory control
- medical image compression
- dynamical systems
- high resolution
- video conferencing
- management system