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Simulation experimental investigation on job release control in semiconductor wafer fabrication.

Chao QiAppa Iyer SivakumarStanley B. Gershwin
Published in: WSC (2007)
Keyphrases
  • wafer fabrication
  • dispatching rule
  • control method
  • pid control
  • matlab simulink
  • simulation model
  • fuzzy control
  • process control
  • discrete event
  • dynamic characteristics
  • optimal control
  • production line