Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations.

Tae-Sun Yu Tae-Eog Lee

Published in: IEEE Trans Autom. Sci. Eng. (2019)

Keyphrases

scheduling problem
clustering algorithm
scheduling algorithm
dynamic scheduling
information systems
end users
software tools
parallel machines
database
data sets
data mining
user friendly
data clustering
hierarchical clustering
round robin
material handling