Modeling and simulation of a complete semiconductor manufacturing facility using Petri nets.
Matthias BeckerPublished in: ETFA (2) (2003)
Keyphrases
- petri net
- discrete event simulation
- semiconductor manufacturing
- colored petri nets
- stochastic petri net
- petri net model
- discrete event systems
- process control
- manufacturing systems
- fuzzy petri net
- ims ld
- discrete dynamical systems
- state machines
- reactive systems
- service composition
- web services
- business process
- e learning
- neural network