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Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System.

Frederick LieChao-Yi HuangChun-Sheng WuKao-Tun ChenHung-Fei Kuo
Published in: IEEE Access (2017)
Keyphrases
  • free form
  • virtual reality
  • ant colony optimization
  • virtual environment
  • complex scenes
  • evolutionary algorithm
  • genetic algorithm
  • learning algorithm
  • search algorithm
  • high resolution
  • metaheuristic
  • shape modeling