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Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times.
Yan Qiao
Naiqi Wu
Qinghua Zhu
Liping Bai
Published in:
Comput. Oper. Res. (2015)
Keyphrases
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wafer fabrication
clustering algorithm
artificial intelligence
case study
data analysis
data sets
optimal solution
image analysis
control system
end users
collaborative learning
statistical analysis
cluster analysis