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Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation.

Changxue WangPeter ShermanAbhijit Chandra
Published in: Int. J. Manuf. Technol. Manag. (2005)
Keyphrases
  • image processing
  • database
  • neural network
  • bayesian networks
  • image analysis
  • artificial intelligence
  • social networks
  • knowledge base
  • computational complexity
  • data analysis
  • medical images
  • statistical analysis