Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators.
Wenjun LiaoWenjing LiuYongming TangBaobing WangHuikai XiePublished in: NEMS (2013)
Keyphrases
- contact force
- position and orientation
- high voltage
- rotation angle
- degrees of freedom
- control system
- mathematical model
- position information
- shape memory alloy
- pan tilt
- image reconstruction
- probabilistic model
- protein structure prediction
- active control
- resonant frequency
- mobile robot
- social networks
- neural network
- databases
- real time