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Virtual de-embedding study for the accurate extraction of Fin FET gate resistance.

Shireen WarnockRob GrovesHongmei LiRichard A. WachnikPooja M. KotechaSungjae LeeNing LuPaul SolomonKeith Jenkins
Published in: CICC (2014)
Keyphrases
  • website
  • data sets
  • statistical analysis
  • augmented reality
  • genetic algorithm
  • three dimensional
  • high accuracy
  • computationally efficient
  • experimental study