Automated generation and parameterization of throughput models for semiconductor tools.
Jan LangeKilian SchmidtRoy BornerOliver RosePublished in: WSC (2008)
Keyphrases
- analytical methods
- mathematical models
- probabilistic model
- end users
- response time
- parameter estimation
- accurate models
- software tools
- fully automated
- data sets
- model selection
- decision making
- genetic algorithm
- markov chain
- decision support
- statistical models
- end to end
- user friendly
- probability distribution
- prior knowledge
- digital libraries
- semi automated
- formal models
- analytical models