Wafer yield prediction using derived spatial variables.
Hang DongNan ChenKaibo WangPublished in: Qual. Reliab. Eng. Int. (2017)
Keyphrases
- prediction accuracy
- spatio temporal
- target variable
- prediction algorithm
- spatial and temporal
- prediction error
- spatial information
- spatial reasoning
- prediction model
- semiconductor manufacturing
- variable selection
- spatial relations
- spatial data
- knowledge base
- real time
- spatial temporal
- massively parallel
- spatial databases
- spatial structure
- machine learning