Wafer yield prediction using derived spatial variables.

Hang Dong Nan Chen Kaibo Wang

Published in: Qual. Reliab. Eng. Int. (2017)

Keyphrases

prediction accuracy
spatio temporal
target variable
prediction algorithm
spatial and temporal

prediction error
spatial information
spatial reasoning
prediction model
semiconductor manufacturing

variable selection
spatial relations
spatial data
knowledge base
real time

spatial temporal
massively parallel
spatial databases
spatial structure
machine learning