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A simple method for sub-100 nm pattern generation with I-line double-patterning technique.
Tzu-I Tsai
Horng-Chih Lin
Min-Feng Jian
Tiao-Yuan Huang
Tien-Sheng Chao
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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pattern generation
line segments
swarm robots
cellular automaton
image processing
neural network
computer vision
website
multiscale
line drawings