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Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods.
Tae-Gyung Lee
Tae-Sun Yu
Tae-Eog Lee
Published in:
IEEE Trans Autom. Sci. Eng. (2023)
Keyphrases
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special case
data cleaning
software tools
clustering algorithm
decision theoretic
optimization problems
optimization algorithm
global optimization
database
data mining
website
user interface
closely related
optimization method
user friendly