Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors.
Bo ZhaoWeijia ShiJiawei ZhangMing ZhangXue QiJiaxin LiFeng LiJiubin TanPublished in: Sensors (2018)
Keyphrases
- data fusion
- sensor data
- sensor networks
- real time
- multi sensor
- multiple stages
- artificial intelligence
- optical flow
- physical phenomena
- semiconductor manufacturing
- neural network
- massively parallel
- degrees of freedom
- data acquisition
- sensor readings
- sensor fusion
- databases
- computer vision
- multistage
- database
- integrated circuit
- low cost
- real world
- website
- imaging sensors
- search engine